Can DUV take us below 100 nm?FINDERS, Jo; JORRITSMA, Louis; EURLINGS, Mark et al.SPIE proceedings series. 2001, pp 153-165, isbn 0-8194-4032-9, 2VolConference Paper

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EUV and x-ray optics (synergy between laboratory and space II)Hudec, R; Pina, Ladislav.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 8076, issn 0277-786X, isbn 978-0-8194-8666-0, 1 vol, isbn 978-0-8194-8666-0Conference Proceedings

Advances in X-ray/EUV optics and components VI (22-24 August 2011, San Diego, California, United States)Morawe, Christian; Khounsary, Ali M; Goto, Shunji et al.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 8139, issn 0277-786X, isbn 978-0-8194-8749-0, 1 vol, isbn 978-0-8194-8749-0Conference Proceedings

Future EUV/UV and visible space astrophysics missions and instrumentation (Waikoloa HI, 22-23 August 2002)Blades, J. Chris; Siegmund, Oswald H.W.SPIE proceedings series. 2003, isbn 0-8194-4633-5, XV, 702 p, isbn 0-8194-4633-5Conference Proceedings

Extreme ultraviolet astronomyBOWYER, S.Scientific American. 1994, Vol 271, Num 2, pp 32-39, issn 0036-8733Article

Excimer ions as possible candidates for VUV and XUV lasersSAUERBREY, R; LANGHOFF, H.IEEE journal of quantum electronics. 1985, Vol 21, Num 3, pp 179-181, issn 0018-9197Article

Extreme ultraviolet interferometry of warm dense matter in laser plasmasGARTSIDE, L. M. R; TALLENTS, G. J; RUS, B et al.Optics letters. 2010, Vol 35, Num 22, pp 3820-3822, issn 0146-9592, 3 p.Article

Comparisons between EUV at-wavelength metrological methodsSUGISAKI, Katsumi; OKADA, Masashi; OUCHI, Chidane et al.Proceedings of SPIE. 2005, pp 59210D.1-59210D.8, isbn 0-8194-5926-7, 1VolConference Paper

Normal incidence spectrophotometer with high-density transmission grating technology and high-efficiency silicon photodiodes for absolute solar extreme-ultraviolet irradiance measurements : Magnetospheric imagery and atmospheric remote sensingOGAWA, H. S; MCMULLIN, D. R; JUDGE, D. L et al.Optical engineering (Bellingham. Print). 1993, Vol 32, Num 12, pp 3121-3125, issn 0091-3286Article

Advanced holographic methods in extreme ultraviolet interference lithographyTERHALLE, Bernd; LANGNER, Andreas; PÄIVÄNRANTA, Birgit et al.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 8102, issn 0277-786X, isbn 978-0-8194-8712-4, 81020V.1-81020V.7Conference Paper

Predictive Modeling of EUV-Lithography: The Role of Mask, Optics, and Photoresist EffectsERDMANN, Andreas; EVANSCHITZKY, Peter; FENG SHAO et al.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 8171, issn 0277-786X, isbn 978-0-8194-8797-1, 81710M.1-81710M.16Conference Paper

Analysis and Control of Thin Film Stresses during Extreme Ultraviolet Lithography Mask Blank FabricationLIANG ZHENG.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7848, issn 0277-786X, isbn 978-0-8194-8378-2, 78483G.1-78483G.8Conference Paper

A practical solution to the critical problem of 193 nm reticle hazeHALBMAIER, Dave; OHYASHIKI, Yasushi; KISHKOVICH, Oleg et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7028, pp 70282G.1-70282G.7, issn 0277-786X, isbn 978-0-8194-7243-4 0-8194-7243-3, 2Conference Paper

Modeling EUVL Illumination SystemsSMITH, Daniel G.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7103, issn 0277-786X, isbn 978-0-8194-7333-2 0-8194-7333-2, 1Vol, 71030B.1-71030B.8Conference Paper

A short period undulator for MAXAHOLA, H; MEINANDER, T.Review of scientific instruments. 1992, Vol 63, Num 1, pp 372-375, issn 0034-6748, 2AConference Paper

ON THE FAR ULTRAVIOLET FLUX DISTRIBUTION OF THE ORION NEBULACARRUTHERS GR; HECKATHORN HM.1981; ASTROPHYS. LETT.; ISSN 0004-6388; USA; DA. 1981; VOL. 22; NO 1; PP. 135-141; BIBL. 16 REF.Article

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Erratum to: Traveling-wave Thomson scattering and optical undulators for high-yield EUV and X-ray sourcesDEBUS, A. D; BUSSMANN, M; SIEBOLD, M et al.Applied physics. B, Lasers and optics (Print). 2010, Vol 101, Num 1-2, issn 0946-2171, p. 483Article

Longitudinal coherence measurements of an extreme-ultraviolet free-electron laserSCHLOTTER, W. F; SORGENFREI, F; BEECK, T et al.Optics letters. 2010, Vol 35, Num 3, pp 372-374, issn 0146-9592, 3 p.Article

The network structure of the merit function space of EUV mirror systemsMARINESCU, Oana; BOCIORT, Florian.Proceedings of SPIE, the International Society for Optical Engineering. 2005, pp 587402.1-587402.8, issn 0277-786X, isbn 0-8194-5879-1, 1VolConference Paper

Surface discharges as intense photon sources in the extreme ultravioletWOODWORTH, J. R; MCKAY, P. F.Journal of applied physics. 1985, Vol 58, Num 9, pp 3364-3367, issn 0021-8979Article

Interpretation of the satellite spectrum that follows ionization in the 5s and 5p shells of Xe at low photon energyHANSEN, J. E; PERSSON, W.Physical review. A, General physics. 1984, Vol 30, Num 3, pp 1565-1567, issn 0556-2791Article

Development of an extreme ultraviolet spectroscope for exospheric dynamics (EXCEED) missionYOSHIOKA, Kazuo; MURAKAMI, Go; UENO, Munetaka et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7077, pp 70771U.1-70771U.8, issn 0277-786X, isbn 978-0-8194-7297-7, 1VolConference Paper